I-Aluminium Nitride Crucible ALN Aluminium Crucible
Isethulo somkhiqizo
I-AlN Ihlanganiswa ngokuncishiswa okushisayo kwe-alumina noma nge-nitride eqondile ye-alumina.Inokuminyana okungu-3.26 Ibhaliswe futhi Ivikelwe yi-MarkMonitor-3, nakuba ingancibiliki, ibola ngaphezu kuka-2500 °C emkhathini.Impahla iboshelwe ngokuhlanganyela futhi imelana ne-sintering ngaphandle kosizo lwesengezo esakha uketshezi.Imvamisa, ama-oxide afana ne-Y 2 O 3 noma i-CaO avumela ukufezwa kwe-sintering emazingeni okushisa aphakathi kuka-1600 no-1900 °C.
I-Aluminium nitride iyimpahla yobumba esebenza kahle kakhulu, futhi ucwaningo lwayo lungalandelelwa emuva eminyakeni engaphezu kwekhulu edlule.Yakhiwa ngu-F. Birgeler kanye no-A. Geuhter Yatholakala ngo-1862, kwathi ngo-1877 yi-JW MalletS I-Aluminium nitride yahlanganiswa okokuqala ngqa, kodwa ayizange isetshenziswe ngendlela engokoqobo iminyaka engaphezu kweyi-100, lapho isetshenziswa njengomanyolo wamakhemikhali. .
Ngoba i-aluminium nitride iyinhlanganisela ehlangene, ene-coefficient encane yokuzihlukanisa nendawo yokuncibilika ephezulu, kunzima ukucwilisa.Kwaze kwaba ngawo-1950 lapho izitsha zobumba ze-aluminium nitride zakhiqizwa ngempumelelo okokuqala ngqa futhi zasetshenziswa njengento ephikisayo ekuncibilikisweni kwensimbi emsulwa, i-aluminium ne-aluminium alloy.Kusukela ngeminyaka yawo-1970, ngokujula kocwaningo, inqubo yokulungiselela i-aluminum nitride ikhula ngokukhula, futhi nobubanzi bokusebenza kwayo buyakhula.Ikakhulukazi selokhu kwangena ikhulu lama-21, ngokuthuthuka okusheshayo kobuchwepheshe be-microelectronics, umshini we-elekthronikhi kanye nezingxenye ze-elekthronikhi ezibheke ku-miniaturization, i-lightweight, ukuhlanganiswa, nokuthembeka okuphezulu kanye nesiqondiso sokuphuma kwamandla aphezulu, amadivaysi ayanda kakhulu e-substrate kanye nezinto zokupakisha zokushisa ukushisa phambili izidingo eziphakeme, kuqhubeke kukhuthaze ukuthuthukiswa okunamandla kwemboni ye-aluminium nitride.
Izici Eziyinhloko
I-AlN Melana nokuguguleka kwezinsimbi eziningi ezincibilikisiwe, ikakhulukazi i-aluminium, i-lithium nethusi
Imelana nokuguguleka okuningi kukasawoti oncibilikisiwe, okuhlanganisa ama-chloride ne-cryolite
Ukushisa okuphezulu kwe-ceramics (ngemuva kwe-beryllium oxide)
Ukumelana nevolumu ephezulu
Amandla e-dielectric aphezulu
Isuswa yi-asidi ne-alkali
Ngefomu lempushana, i-hydrolyzed kalula ngamanzi noma umswakama womswakama
Isicelo Esiyinhloko
1, uhlelo lokusebenza lwedivayisi ye-piezoelectric
I-Aluminium nitride ine-resistivity ephezulu, i-thermal conductivity ephezulu (izikhathi ezingu-8-10 ze-Al2O3), kanye ne-coefficient ephansi yokwandisa efana ne-silicon, okuyingxenye efanelekile yokushisa okuphezulu kanye nemishini ye-elekthronikhi enamandla amakhulu.
2, i-electronic packaging substrate material
Izinto ezisetshenziswa kakhulu ze-ceramic substrate ziyi-beryllium oxide, i-alumina, i-aluminium nitride, njll., lapho i-alumina ceramic substrate ine-conductivity ephansi ye-thermal, i-coefficient yokwandisa ukushisa ayifani ne-silicon;nakuba i-beryllium oxide inezakhiwo ezinhle kakhulu, kodwa impushana yayo inobuthi obukhulu.
Phakathi kwezinto ezikhona ze-ceramic ezingasetshenziswa njengezinto ze-substrate, i-silicon nitride ceramic inamandla okugoba aphakeme kakhulu, ukumelana nokugqokwa okuhle, insimbi ye-ceramic enomshini osebenza kahle kakhulu ophelele, kanye ne-coefficient encane yokwandisa okushisayo.I-Aluminium nitride ceramics inokuhamba okuphezulu kwe-thermal, ukumelana okuhle komthelela oshisayo, futhi isenezici ezinhle zemishini ekushiseni okuphezulu.Mayelana nokusebenza, i-aluminium nitride ne-silicon nitride njengamanje yizinto ezifanele kakhulu zama-substrates okupakishwa kwe-elekthronikhi, kodwa futhi zinenkinga evamile ukuthi intengo iphezulu kakhulu.
3, futhi isetshenziswa ezintweni ezikhanyayo
Ububanzi obukhulu begebe eliqondile le-bandgap le-aluminium nitride (AlN) ngu-6.2 eV, enokuguqulwa okuphakeme kwesithombe sikagesi ngokusebenza kahle uma kuqhathaniswa nesemiconductor ye-bandgap engaqondile.I-AlN Njengokukhanya okuluhlaza okubalulekile okubalulekile kanye nezinto ezikhipha ukukhanya kwe-UV, isetshenziswa ku-UV / i-UV ejulile ekhipha ukukhanya kwe-UV, i-UV laser diode kanye nomtshina we-UV.Ngaphezu kwalokho, i-AlN ingakha izixazululo eziqinile eziqhubekayo ngama-nitrides eqembu III njenge-GaN ne-InN, futhi ingxubevange yayo ye-ternary noma ye-quaternary ingaqhubeka nokulungisa igebe lebhendi yayo kusukela ekubonakaleni kuya kumabhendi e-ultraviolet ajulile, iyenze ibe into ebalulekile esebenza kahle ekhanyayo.
4, ezisetshenziswa ku-substrate materials
Amakristalu e-AlN ayi-substrate ekahle ye-GaN, i-AlGaN kanye nezinto ze-AlN epitaxial.Uma kuqhathaniswa nesafire noma i-SiC substrate, i-AlN inokufanelana okushisayo okuningi ne-GaN, inokuhambisana okuphezulu kwamakhemikhali, kanye nokucindezeleka okuncane phakathi kwe-substrate ne-epitaxial layer.Ngakho-ke, lapho i-AlN crystal isetshenziswa njenge-GaN epitaxial substrate, inganciphisa kakhulu ukuminyana kwesici kudivayisi, ithuthukise ukusebenza kwedivayisi, futhi ibe nethemba elihle lohlelo lokusebenza ekulungiseleleni izinga lokushisa eliphezulu, imvamisa ephezulu namandla aphezulu kagesi. amadivaysi.
Ngaphezu kwalokho, i-AlGaN epitaxial material substrate ene-AlN crystal njengengxenye ye-aluminium (Al) ephezulu ingase futhi inciphise ngempumelelo ukuminyana kwesici kungqimba ye-nitride epitaxial, futhi ithuthukise kakhulu ukusebenza nempilo yesevisi yedivayisi ye-nitride semiconductor.Izitholi eziphezulu zansuku zonke ezingaboni kahle ezisuselwe ku-AlGaN zisetshenziswe ngempumelelo.
5, esetshenziswa ku-ceramics nezinto eziphikisayo
I-Aluminium nitride ingasetshenziswa ekufakweni kwe-ceramics yesakhiwo, i-aluminium nitride ceramics elungiselelwe, hhayi kuphela izakhiwo ezinhle zemishini, amandla okugoqa aphezulu kune-Al2O3 ne-BeO Ceramics, ubulukhuni obuphezulu, kodwa futhi izinga lokushisa eliphezulu nokumelana nokugqwala.Isebenzisa ukumelana nokushisa kwe-AlN Ceramic kanye nokumelana nokugqwala, ingasetshenziswa ukwenza izingxenye ezimelana nezinga lokushisa eliphezulu ezifana ne-crucible ne-Al evaporation plate.Ngaphezu kwalokho, izitsha zobumba ezihlanzekile ze-AlN zingamakristalu abonisa ngale angenambala, anezici ezinhle kakhulu zokubona, futhi angasetshenziswa njengefasitela le-infrared lokushisa eliphezulu kanye nokwemboza okumelana nokushisa kwezitsha zobumba ezibonisa izinto ezisebenza ngogesi.
6. Izinhlanganisela
I-epoxy resin / i-AlN composite material, njengempahla yokupakisha, idinga ukuguquguquka okuhle kwe-thermal kanye nekhono lokulahla ukushisa, futhi le mfuneko iya ngokuya iqinile.Njengempahla ye-polymer enezici ezinhle zamakhemikhali nokuzinza kwemishini, i-epoxy resin kulula ukuyelapha, ngezinga eliphansi lokuncipha, kodwa ukuqhutshwa kokushisa akuphakeme.Ngokungeza i-AlN nanoparticles ene-thermal conductivity enhle kakhulu ku-epoxy resin, ukuqhutshwa kwe-thermal namandla kungathuthukiswa ngempumelelo.
